Isotopic analysis of highly enriched crystalline 28Si and initial 28SiF4 by high-resolution inductively coupled plasma mass spectrometry

T15N3

P.A. Otopkova1, A.M. Potapov, A.I. Suchkov, A.D. Bulanov, A.Yu. Lashkov1, A.E. Kurganova

A technique for determining the isotopic composition of highly enriched silicon in the form of elementary 28Si and initial 28SiF4 by a single collector double focusing sector field ICP-MS over a wide range of isotope concentrations (more than 6 orders of magnitude) was described. To expand the range of measured isotopic concentrations the signals of the main and “impurity” isotopes were recorded in solutions of different concentrations. Determination of the matrix effects and the mass discrimination factors was carried out using the isotopic dilution method. This technique allowed us to realize the uncertainty of measuring the concentration of the main isotope to ten thousandths of a percent when enriching > 99.999% on a high-resolution single-collector mass spectrometer with inductively coupled plasma.

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