Оценка неопределенности измерения изотопного состава высокообогащенного 28Si
A technique for uncertainty estimation of an isotopic composition of highly enriched silicon-28 in the form of a single crystal, silicon tetrafl uoride and silane by laser ionization mass spectrometry is described. It is shown that the use of potassium as an internal standard limits the uncertainty of measurement due to the uncertainty of silicon isotopes tabulated abundances. It is found that interferences of the ions 28 SiH+ on 29 Si + should be taken into consideration during direct measurements of isotopic composition of poly- and single crystals of highly enriched silicon-28. The contribution of the 28 SiH+ to the 29 Si + peak intensity is estimated.